Arrangement for spatially resolved determination of the specific electrical resistance and/or the specific electrical conductivity of samples

Abstract

An arrangement for a spatially resolved determination of the specific electrical resistance and/or of the specific electrical conductivity of a sample at different positions, in which a plurality of detectors are configured for a spatially resolved spectral analysis of electromagnetic radiation within a wavelength interval and is incident onto the detectors. A radiation onto a surface takes place with homogeneous intensity. The measurement signals of the detectors detected with spatial resolution and wavelength resolution within a wavelength interval are compared for each detected position with a wavelength-resolved function that are compared by calculation of the propagation of electromagnetic radiation in multilayer systems while using an optical model for a physical description of the examined sample while taking account of the wavelength-dependent progressions of the linear optical refractive indices n and of the coefficients of absorption k of all the materials and/or substances forming the sample that can be approximated by a physical function of a complex refractive index of the conductive material or substance. They are brought to a sufficient overlap with a calibration curve progression by a change of the parameters of the physical function to determine the specific electrical resistance and/or the specific electrical conductivity at different positions with spatial resolution.