The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 05, 2019

Filed:

May. 17, 2016
Applicant:

Robert Bosch Gmbh, Stuttgart, DE;

Inventors:

Roland Guenschel, Wannweil, DE;

Harald Guenschel, Gerach, DE;

Lothar Diehl, Gemmrigheim, DE;

Gerhard Schneider, Pettstadt, DE;

Assignee:

Robert Bosch GmbH, Stuttgart, DE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/407 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
G01N 27/4078 (2013.01); B81C 1/00253 (2013.01); B81B 2201/0214 (2013.01); B81B 2203/0127 (2013.01); B81C 2201/019 (2013.01); G01N 27/4071 (2013.01);
Abstract

A packaging technology for MECS components, which allows the realization of extremely robust components which are resistant to high temperatures and media. Such a component includes at least one micro-electrochemical sensor (MECS) component having a diaphragm, which is developed in a layer construction on the substrate of the component and spans an opening in the substrate rear side, and a carrier for the mounting and electrical contacting of the MECS component on an application circuit board. The MECS component is bonded to the carrier in flip chip technology, so that a hermetically tight mechanical connection between the top surface of the MECS component and the carrier surface exists at least in one connection region, and an electric connection between the MECS component and the carrier exists in at least one contact area.


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