The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2019
Filed:
Sep. 29, 2016
Applicant:
Osram Opto Semiconductors Gmbh, Regensburg, DE;
Inventor:
Andreas Rückerl, Konzell, DE;
Assignee:
OSRAM OPTO SEMICONDUCTORS GMBH, Regensburg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/40 (2006.01); C23C 16/455 (2006.01); C23C 16/56 (2006.01); H01L 51/52 (2006.01); H01L 33/44 (2010.01);
U.S. Cl.
CPC ...
C23C 16/403 (2013.01); C23C 16/45525 (2013.01); C23C 16/56 (2013.01); H01L 33/44 (2013.01); H01L 51/5253 (2013.01); H01L 51/5268 (2013.01); H01L 2933/0025 (2013.01); H01L 2933/0091 (2013.01);
Abstract
A method for producing an apparatus, an apparatus and an optoelectronic component are disclosed. In an embodiment the method includes providing a carrier, depositing an amorphous ALD layer on the carrier using an ALD method and recrystallizing the amorphous ALD layer into a crystalline layer.