The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2019
Filed:
Mar. 05, 2013
Applicant:
Samsung Corning Precision Materials Co., Ltd., Gyeongsangbuk-do, KR;
Inventors:
Hoikwan Lee, ChungCheongNam-Do, KR;
Kyungmin Yoon, ChungCheongNam-Do, KR;
Seo-Yeong Cho, ChungCheongNam-Do, KR;
Assignee:
Corning Precision Materials Co., Ltd., Asan-si, Chungcheongnam-do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05B 6/64 (2006.01); H05B 6/70 (2006.01); H05B 6/78 (2006.01); C03B 29/08 (2006.01); F27B 9/36 (2006.01); F27D 11/12 (2006.01); F27D 99/00 (2010.01);
U.S. Cl.
CPC ...
H05B 6/64 (2013.01); C03B 29/08 (2013.01); F27B 9/36 (2013.01); F27D 11/12 (2013.01); F27D 99/0006 (2013.01); H05B 6/70 (2013.01); H05B 6/78 (2013.01); F27D 2099/0026 (2013.01);
Abstract
A high frequency heating apparatus which heats a substrate by applying high frequency waves thereto. The high frequency heating apparatus includes a high frequency generator which generates high frequency to heat the substrate. The distance from the substrate to the high frequency generator is n/2*λ, where n is a natural number ranging from 1 to 6, and λ is the wavelength of the high frequency that is generated by the high frequency generator.