The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2019
Filed:
Aug. 01, 2018
Commissariat À L'énergie Atomique ET Aux Énergies Alternatives, Paris, FR;
Patrick Leduc, Grenoble, FR;
Abstract
A method for manufacturing a device () for detecting electromagnetic radiation. The method comprises the steps of: supplying a first substrate () comprising a reading circuit (), at least two first contact plugs () and at least one first annular bonding element () surrounding the first contact plugs (); supplying a second substrate comprising a cap (), an annular side wall forming with the cap () a cavity filled with a sacrificial material and a detection structure () housed in the cavity. The method further comprising the steps of bonding the second substrate () on the first substrate (); arranging at least one opening () in the second substrate (); selective elimination of the sacrificial material; and closing the opening () under at least a primary vacuum.