The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2019
Filed:
Sep. 29, 2016
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Andrew H. Breninger, Hillsboro, OR (US);
Gary Lind, Nevada City, CA (US);
Assignee:
LAM RESEARCH CORPORATION, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); F16L 37/22 (2006.01); F16F 1/04 (2006.01); F16B 21/07 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68742 (2013.01); F16L 37/22 (2013.01); F16B 21/073 (2013.01); F16F 1/045 (2013.01);
Abstract
A lift pin holder assembly includes a lift pin holder including a central bore defining a first groove arranged on a radially inner surface of the central bore. The lift pin holder is made of a non-metallic material. A lift pin includes a second groove arranged on a radially outer surface thereof. A spring is at least partially arranged in the first groove of the lift pin holder and the second groove of the lift pin to retain the lift pin in the lift pin holder.