The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 29, 2019

Filed:

Aug. 13, 2014
Applicant:

Bridgestone Corporation, Tokyo, JP;

Inventor:

Fumiya Kobayashi, Kodaira, JP;

Assignee:

MARUWA CO., LTD., Owariasahi, Aichi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05B 3/68 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); C23C 16/458 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67103 (2013.01); C23C 16/4584 (2013.01); H01L 21/68764 (2013.01); H01L 21/68771 (2013.01); H01L 21/68785 (2013.01); H01L 21/68792 (2013.01);
Abstract

A bearing () being a recessed section that receives a spindle () is provided in a lower surface (B) of a susceptor (). The bearing () has a tapers from the lower surface (B) towards an upper surface (A). A gap (B) is provided in an side wall (A) of the bearing (), further on the outside of the bearing () than a fitting surface (X) between the bearing () and the spindle () in the horizontal direction. As a result, reduction in the fitting force between the susceptor bearing and the spindle can be suppressed and susceptor temperature reduction in the vicinity of the bearing can also be suppressed.


Find Patent Forward Citations

Kobayashi, Fumiya. (2019). Susceptor (U.S. Patent No. 10460965). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10460965

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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