The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2019
Filed:
Aug. 24, 2015
U.s. Army Research Laboratory Attn: Rdrl-loc-i, Adelphi, MD (US);
Michael A. Derenge, Columbia, MD (US);
The United States of America as represented by the Secretary of the Army, Washington, DC (US);
Abstract
An improved methodology for annealing group III-nitride semiconductor device structures using novel weighted cover systems that protect an annealing cap during the semiconductor annealing process is disclosed. The weighted cover system is configured for preventing the escape of nitrogen from the capped semiconductor during annealing. In one particular embodiment, the weighted cover system comprises a protective cover configured to be placed on the capped semiconductor during the anneal, and one or more weights configured to be placed on the protective cover to provide sufficient downward force to the protective cover that is placed on the capped semiconductor.