The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2019
Filed:
Sep. 21, 2016
Hitachi Metals, Ltd., Minato-ku, Tokyo, JP;
Takao Goto, Mie, JP;
HITACHI METALS, LTD., Tokyo, JP;
Abstract
A recording means records a value of pressure of fluid on a downstream side of a differential pressure generation means during a time period after a flow control valve open and control of a flow rate is started or after the flow control valve is closed and the control of a flow rate is stopped until a measured flow rate becomes stable, and a diagnostic means contrasts a controlled value acquired based in a value of the pressure of the fluid on the downstream side recorded by the recording means, with a controlled value when abnormality has not occurred, and diagnoses that abnormality has occurred in the flow meter when a difference between the both controlled values exceeds a threshold. Thereby, a mass flow controller and a diagnostic method which can simply diagnose generation of abnormality in a differential pressure type flow meter without requiring time only for performing the diagnosis.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile