The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2019
Filed:
Oct. 19, 2017
Applicant:
Nikon Corporation, Minato-ku, Tokyo, JP;
Inventors:
Shigeru Morimoto, Saitama, JP;
Tadahiro Kominami, Saitama, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/58 (2006.01); G03F 7/20 (2006.01); H02K 41/03 (2006.01); H02K 9/19 (2006.01); H02K 9/22 (2006.01); H02K 3/47 (2006.01); H02K 16/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70758 (2013.01); G03F 7/70716 (2013.01); G03F 7/70725 (2013.01); G03F 7/70858 (2013.01); G03F 7/70875 (2013.01); H02K 41/031 (2013.01); H02K 3/47 (2013.01); H02K 9/19 (2013.01); H02K 9/22 (2013.01); H02K 16/00 (2013.01); H02K 2201/18 (2013.01);
Abstract
A linear motor with high heat recovery efficiency that inhibits the rise in surface temperature is offered. The linear motor is disposed in a surrounding member () and facing a flow passage () of a liquid for regulating temperature, and is provided with a coil unit () having at least a part thereof in contact with the liquid. The coil unit () is provided with a coil body (), a mold layer () that covers the coil body and holds it in specific form, and a liquid protection layer () that covers the mold layer () and has liquid protection properties.