The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2019
Filed:
Sep. 07, 2017
Applicant:
Toshiba Memory Corporation, Tokyo, JP;
Inventor:
Toshiaki Komukai, Kanagawa, JP;
Assignee:
Toshiba Memory Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B29C 59/00 (2006.01); B29C 59/16 (2006.01); G03F 1/42 (2012.01); H01L 21/027 (2006.01); G03F 1/56 (2012.01); G03F 1/80 (2012.01); G03F 7/00 (2006.01); G03F 9/00 (2006.01);
U.S. Cl.
CPC ...
G03F 1/42 (2013.01); G03F 1/56 (2013.01); G03F 1/80 (2013.01); G03F 7/0002 (2013.01); G03F 9/7042 (2013.01); H01L 21/0272 (2013.01);
Abstract
According to an embodiment, a template is provided which includes a template substrate, and a device formation pattern and an alignment mark provided on a common surface of the template substrate. The alignment mark includes a refraction layer provided at a bottom of a first concave pattern provided on the template substrate, and an insulating layer filling the first concave pattern provided with the refraction layer.
Quick Actions:
Komukai, Toshiaki. (2019). Template and template manufacturing method (U.S. Patent No. 10459335). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10459335
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile