The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2019
Filed:
Nov. 17, 2017
Olympus Corporation, Tokyo, JP;
OLYMPUS CORPORATION, Tokyo, JP;
Abstract
A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set so as not to include the optical axis at a pupil position of the illumination optical system and is set such that the illumination light is applied to part of the inside of the pupil and the outside of the pupil at a pupil position of the observation optical system. The predetermined processing step includes a step of receiving light, a step of obtaining the quantity of light, a step of calculating the difference or the ratio between the quantity of light and a reference quantity of light, and a step of calculating the amount of tilt in the surface of the sample from the difference or the ratio.