The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2019
Filed:
Jun. 17, 2016
Applicant:
Nikon Corporation, Tokyo, JP;
Inventors:
Assignee:
NIKON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 9/26 (2006.01); C30B 29/12 (2006.01); C30B 33/06 (2006.01); H01J 61/30 (2006.01); H01J 9/24 (2006.01); H01J 61/02 (2006.01);
U.S. Cl.
CPC ...
C30B 29/12 (2013.01); C30B 33/06 (2013.01); H01J 9/247 (2013.01); H01J 61/025 (2013.01); H01J 61/30 (2013.01); H01J 61/302 (2013.01);
Abstract
The calcium fluoride member includes a first member made from monocrystalline calcium fluoride and a second member made from monocrystalline or polycrystalline calcium fluoride. The first member and the second member is pressure-bonded together to form the calcium fluoride member.