The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2019
Filed:
May. 29, 2018
Applicants:
Tsinghua University, Beijing, CN;
Hon Hai Precision Industry Co., Ltd., New Taipei, TW;
Inventors:
Assignees:
Tsinghua University, Beijing, CN;
HON HAI PRECISION INDUSTRY CO., LTD., New Taipei, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C01B 32/162 (2017.01); B82B 3/00 (2006.01); C01B 32/168 (2017.01); B82Y 40/00 (2011.01); B82Y 30/00 (2011.01);
U.S. Cl.
CPC ...
C01B 32/162 (2017.08); B82B 3/0004 (2013.01); C01B 32/168 (2017.08); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); C01B 2202/24 (2013.01);
Abstract
A method for making carbon nanotube array includes depositing a catalyst layer on a substrate surface of a growth substrate, to form a composite structure. The composite structure is placed in a chamber. The carbon source gas and protective gas are supplied to the chamber, and the composite structure is heated to a first temperature, to grow a carbon nanotube array on the substrate surface. Then the carbon nanotube is oxidized.