The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2019
Filed:
Dec. 15, 2017
Applicant:
Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v., Munich, DE;
Inventors:
Harald Schenk, Dresden, DE;
Holger Conrad, Dresden, DE;
Matthieu Gaudet, Cottbus, DE;
Klaus Schimmanz, Cottbus, DE;
Sergiu Langa, Dresden, DE;
Bert Kaiser, Weinboehla, DE;
Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H04R 19/00 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); H04R 9/02 (2006.01); H04R 15/00 (2006.01); H04R 17/00 (2006.01); H04R 23/00 (2006.01); H04R 1/02 (2006.01); H04R 1/08 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0021 (2013.01); B81C 1/0015 (2013.01); B81C 1/00142 (2013.01); B81C 1/00158 (2013.01); H04R 9/02 (2013.01); H04R 15/00 (2013.01); H04R 17/00 (2013.01); H04R 19/005 (2013.01); H04R 23/002 (2013.01); B81B 2201/0257 (2013.01); B81B 2201/036 (2013.01); B81B 2203/0109 (2013.01); B81B 2203/019 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0136 (2013.01); B81B 2203/051 (2013.01); H04R 1/023 (2013.01); H04R 1/08 (2013.01); H04R 2201/003 (2013.01); H04R 2499/11 (2013.01);
Abstract
A MEMS transducer for interacting with a volume flow of a fluid includes a substrate including a cavity, and an electromechanical transducer connected to the substrate in the cavity and including an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related.