The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2019
Filed:
Nov. 27, 2015
Applicant:
Sony Corporation, Tokyo, JP;
Inventors:
Shinya Morita, Tokyo, JP;
Koichi Ikeda, Kanagawa, JP;
Assignee:
SONY CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02N 1/08 (2006.01); H01L 29/36 (2006.01); H02N 1/00 (2006.01); B81B 3/00 (2006.01); H01H 59/00 (2006.01); H01L 29/02 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0021 (2013.01); B81B 3/0016 (2013.01); H01H 59/0009 (2013.01); H02N 1/00 (2013.01); H02N 1/008 (2013.01); B81B 3/0013 (2013.01); B81B 2201/018 (2013.01); B81B 2201/033 (2013.01); B81B 2203/04 (2013.01); B81B 2203/051 (2013.01);
Abstract
An electrostatic actuator includes a base, a movable electrode including a semiconductor and supported to the base to be displaceable in a first direction, and a fixed electrode including the semiconductor and fixed to the base, in which the fixed electrode faces the movable electrode in a state of being separated therefrom in the first direction. The electrostatic actuator includes a high-resistance region formed in at least a portion of each of respective facing surfaces of the movable electrode and the fixed electrode, and lower in impurity concentration than a surrounding region thereof.