The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2019
Filed:
Apr. 13, 2017
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventor:
Noritoshi Sakamoto, Shimotsuga-gun, JP;
Assignee:
CANON KABUSHIKI KAISHA, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T 7/20 (2017.01); H04N 5/235 (2006.01); G03F 9/00 (2006.01);
U.S. Cl.
CPC ...
H04N 5/2353 (2013.01); G03F 9/7042 (2013.01); G03F 9/7088 (2013.01);
Abstract
A detecting apparatus that detects a mark includes: an imaging device configured to perform imaging of the mark; and a controller configured to control the imaging device. The controller is configured to control the imaging device such that only a period in which a position of an object with the mark is within a tolerance is a period of the imaging before the position converges within the tolerance.
Sakamoto, Noritoshi. (2019). Detecting apparatus, detecting method, computer-readable medium storing a program, lithography apparatus, and article manufacturing method that control imaging device to perform imaging at particular time period (U.S. Patent No. 10455160). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10455160
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile