The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2019
Filed:
Aug. 09, 2017
Applicant:
Facebook Technologies, Llc, Menlo Park, CA (US);
Inventor:
Stephen John Holmes, Glasgow, GB;
Assignee:
Facebook Technologies, LLC, Menlo Park, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/52 (2006.01); H01L 23/482 (2006.01); H01L 21/768 (2006.01); H01L 27/15 (2006.01); H01L 33/62 (2010.01);
U.S. Cl.
CPC ...
H01L 23/4821 (2013.01); H01L 21/76885 (2013.01); H01L 27/156 (2013.01); H01L 33/62 (2013.01); H01L 2933/0066 (2013.01);
Abstract
Structures of and methods for fabricating fine-scale interconnects are disclosed. A 'mushroom'-type structure with a narrow stalk supporting a wider cap can be used for fine-scale interconnects with widths on the scale of hundreds of nanometers that have low resistivity. Micro-air bridges can be introduced by omitting the stalk in sections of the interconnect, allowing the interconnect to bridge over obstacles.