The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2019
Filed:
Nov. 10, 2016
Applied Materials, Inc., Santa Clara, CA (US);
Luke W. Bonecutter, Cedar Park, TX (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An electronic device manufacturing system includes a factory interface that has a load port. The load port may include a panel having a back surface. The back surface may have a groove extending along an outer portion of the panel. The groove may include a neck region and a flared base region. The neck region may have a rectangular cross section that extends to a flared base region. A bulb seal or a rectangularly-shaped seal may be seated in the groove and may be configured to seal an interface between the load port and the factory interface. Methods of assembling a factory interface for an electronic device manufacturing system are also provided, as are other aspects.