The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2019
Filed:
Apr. 17, 2017
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventor:
Jiansheng Wang, Union City, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B08B 3/12 (2006.01); B08B 3/14 (2006.01); B08B 3/00 (2006.01); B08B 3/10 (2006.01); C11D 11/00 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67057 (2013.01); B08B 3/00 (2013.01); B08B 3/10 (2013.01); B08B 3/12 (2013.01); B08B 3/14 (2013.01); C11D 11/0047 (2013.01); H01L 21/67253 (2013.01); H01L 22/26 (2013.01);
Abstract
Embodiments of the present disclosure generally relate to cleaning substrates, and more particularly, to methods and apparatus for endpoint detection of a cleaning process. The apparatus includes an outer cleaning basin, a liner, and a circulation system coupled to the liner. The circulation system includes a filter for removing particles from a fluid. A liquid particle counter is fluidly coupled to fluid in the liner for performing particle counting. Methods for using the apparatus are also described.