The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2019
Filed:
Mar. 16, 2018
Nikon Corporation, Tokyo, JP;
Patrick Chang, San Mateo, CA (US);
Michel Pharand, Los Gatos, CA (US);
Matthew Rosa, Tokyo, JP;
Jonathan K. Wells, San Francisco, CA (US);
Pedro Reynoso-Mora, Mexico City, MX;
NIKON RESEARCH CORPORATION OF AMERICA, Belmont, CA (US);
Abstract
An actuator assembly () for moving a device () includes a stator component (), a mover component (), a measurement system (), and a signal processor (). The measurement system () includes (i) a magnet assembly () that is coupled to and moves with the mover component (); and (ii) a plurality of spaced apart sensors (A). The magnet assembly () produces a magnetic field (B) that moves relative to the stator component () as the mover component () moves along a mover axis (C). Each sensor (A) is a transducer that generates a sensor signal that varies its output voltage in response to the changing magnetic field (B) from the magnet assembly () as the mover component () is moved relative to the sensors (A). The signal processor () receives the sensor signals and estimates a position of the mover component () along the mover axis (C) based at least in part on the sensor signals.