The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2019
Filed:
Jun. 19, 2017
Applicant:
AZ Electronic Materials (Luxembourg) S.a.r.l., Luxembourg, LU;
Inventors:
Kazuma Yamamoto, Kakegawa, JP;
Yuriko Matsuura, Kakegawa, JP;
Tomoyasu Yashima, Kakegawa, JP;
Tatsuro Nagahara, Kakegawa, JP;
Assignee:
AZ Electronic Materials (Luxembourg) S.a.r.l., Luxembourg, LU;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 1/12 (2006.01); G03F 7/40 (2006.01); C11D 3/20 (2006.01); C11D 3/48 (2006.01); C11D 11/00 (2006.01); C11D 1/00 (2006.01); G03F 7/039 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/40 (2013.01); C11D 1/004 (2013.01); C11D 3/2055 (2013.01); C11D 3/48 (2013.01); C11D 11/0047 (2013.01); G03F 7/0392 (2013.01); G03F 7/2004 (2013.01);
Abstract
The present invention relates to a new rinse composition, the forming of resist patterns using the rinse composition, and a semiconductor device manufacturing method using the rinse composition in a photolithography method.