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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10451971 B1

PDFFull Text
Expired
Date of Patent:
Oct. 22, 2019

Filed:

Feb. 02, 2016

Composition for forming underlayer and method for forming underlayer therewith

Applicant:

AZ Electronic Materials (Luxembourg) S.a.r.l., Luxembourg, LU;

Inventors:

Masato Suzuki, Kakegawa, JP;

Yusuke Hama, Kakegawa, JP;

Hiroshi Yanagita, Kakegawa, JP;

Go Noya, Kakegawa, JP;

Shigemasa Nakasugi, Kakegawa, JP;

Assignee:

AZ Electronic Materials (Luxembourg) S.a.r.l., Luxembourg, LU;

Attorney:

Drinker Biddle & Reath LLP

Primary Examiner:

Cynthia Hamilton

Int. Cl.
CPC ...
G03F 7/11 (2006.01); C09D 177/10 (2006.01); C09D 179/02 (2006.01); C08G 73/02 (2006.01); G03F 7/09 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01); G03F 7/30 (2006.01);
U.S. Cl.
CPC ...
G03F 7/11 (2013.01); C08G 73/026 (2013.01); C09D 177/10 (2013.01); C09D 179/02 (2013.01); G03F 7/094 (2013.01); G03F 7/16 (2013.01); G03F 7/168 (2013.01); G03F 7/2006 (2013.01); G03F 7/30 (2013.01);
Abstract

[Problem] To provide a composition for an underlayer, which can form an underlayer having flattened surface. [Means for Solution] A composition for forming an underlayer, comprising a polymer having a repeating unit containing nitrogen and a solvent. An underlayer is formed by coating this composition on a substrate, preferably baking in an inert atmosphere, and then baking in the air containing oxygen.

Find Patent Forward Citations

Suzuki, Masato. (2019). Composition for forming underlayer and method for forming underlayer therewith (U.S. Patent No. 10451971). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10451971

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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