The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2019
Filed:
Oct. 05, 2017
Hitachi-lg Data Storage, Inc., Tokyo, JP;
Katsuhiko Kimura, Tokyo, JP;
Daisuke Tomita, Tokyo, JP;
Hitachi-LG Data Storage, Inc., Tokyo, JP;
Abstract
Provided is a scanning type image measuring apparatus capable of reducing an imaging time while suppressing an increase in power consumption. The scanning type image measuring apparatus includes an objective lens scanning mechanism for operating an objective lens in a first direction and a second direction perpendicular to the first direction, wherein, with respect to a resonance frequency related to a spring constant of a support member supporting a movable unit including the objective lens and a mass of the movable unit, the resonance frequency in the second direction is set to be higher than the resonance frequency in the first direction, and a scanning frequency of the objective lens in the second direction is set to be higher than the resonance frequency in the second direction.