The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2019
Filed:
Mar. 02, 2018
Sourabh Saha, Livermore, CA (US);
Robert Matthew Panas, Dublin, CA (US);
Michael A. Cullinan, Austin, TX (US);
Ian Seth Ladner, Livermore, CA (US);
Sourabh Saha, Livermore, CA (US);
Robert Matthew Panas, Dublin, CA (US);
Michael A. Cullinan, Austin, TX (US);
Ian Seth Ladner, Livermore, CA (US);
Lawrence Livermore National Security, LLC, Livermore, CA (US);
Board of Regents, The University of Texas System, Austin, TX (US);
Abstract
This invention relates to a microelectromechanical device for mechanical characterization of a specimen. In one embodiment the device may incorporate a substrate, at least one first flexure bearing and at least one second flexure bearing, both being supported on the substrate. First and second movable shuttles may be used which are supported above the substrate by the flexure bearings so that each is free to move linearly relative to the substrate. Ends of the movable shuttles are separated by a gap. A thermal actuator may be connected to one end of the first movable shuttle, and operates to cause the first movable shuttle to move in a direction parallel to the surface of the substrate in response to a signal applied to the thermal actuator. A first capacitive sensor may be formed between the first movable shuttle and the substrate, and a second capacitive sensor formed between the second movable shuttle and the substrate.