The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2019
Filed:
Aug. 16, 2017
Applicant:
Seiko Instruments Inc., Chiba-shi, Chiba, JP;
Inventors:
Tomoo Kobayashi, Chiba, JP;
Ryo Sugawara, Chiba, JP;
Assignee:
SEIKO INSTRUMENTS INC., Chiba, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/00 (2006.01); G01L 7/08 (2006.01); B23K 20/02 (2006.01);
U.S. Cl.
CPC ...
G01L 7/082 (2013.01); B23K 20/023 (2013.01); G01L 9/0044 (2013.01); G01L 9/0055 (2013.01);
Abstract
Provided herein is a diaphragm that is highly durable, and that does not involve the risk of gas leakage, and a pressure sensor using such a diaphragm. The diaphragm is a metallic diaphragm that includes a plate-shaped pressure receiver, and a frame-like support member. The pressure receiver has a metal structure grown parallel to a flat plate surface of the plate-shaped pressure receiver.