The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 22, 2019

Filed:

Sep. 24, 2015
Applicant:

U.s.a. Represented BY the Administrator of the National Aeronautics and Space Administration, Washington, DC (US);

Inventors:

Mahmooda Sultana, Laurel, MD (US);

Mary J. Li, Bethesda, MD (US);

Anthony W. Yu, Spencerville, MD (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B32B 9/00 (2006.01); C23C 16/26 (2006.01); C23C 16/01 (2006.01); G02F 1/01 (2006.01); G02B 6/02 (2006.01); G02F 1/35 (2006.01); C01B 32/186 (2017.01); C01B 32/194 (2017.01); G02B 6/36 (2006.01); F21V 8/00 (2006.01); B82Y 20/00 (2011.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
C23C 16/26 (2013.01); C01B 32/186 (2017.08); C01B 32/194 (2017.08); C23C 16/01 (2013.01); G02B 6/0008 (2013.01); G02B 6/02 (2013.01); G02B 6/3624 (2013.01); G02F 1/011 (2013.01); G02F 1/3523 (2013.01); B82Y 20/00 (2013.01); B82Y 40/00 (2013.01);
Abstract

The present invention relates to a method of manufacturing large area graphene for graphene-based photonics devices such as bolometric graphene detectors, or for use as a saturable absorber in ultra-high bandwidth detectors for producing ultrafast laser pulses. The method includes: growing a first graphene layer on one side of a metal substrate, and a second graphene layer on another side of the metal substrate; coating the first graphene layer with a plurality of resist layers including a low molecular weight polymethylmethacrylate, and a high molecular weight polymethylmethacrylate; removing the second graphene layer and the metal substrate to reveal the first graphene layer; disposing the first graphene layer on an optical substrate; and removing the plurality of resist layers from the first graphene layer to reveal a final graphene layer, which can be used as the basis to manufacture a multilayer graphene structure for graphene detectors.


Find Patent Forward Citations

Loading…