The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 22, 2019

Filed:

Apr. 06, 2018
Applicant:

Agc Inc., Chiyoda-ku, JP;

Inventors:

Yasuaki Watanabe, Tokyo, JP;

Koji Nakamura, Tokyo, JP;

Tsubasa Kondo, Tokyo, JP;

Yasunori Ito, Tokyo, JP;

Yuki Hori, Tokyo, JP;

Hiroshi Utsugi, Tokyo, JP;

Assignee:

AGC Inc., Chiyoda-ku, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23B 43/00 (2006.01); H01L 21/67 (2006.01); B32B 43/00 (2006.01); B32B 15/04 (2006.01); B32B 17/06 (2006.01); B32B 27/08 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
B32B 43/006 (2013.01); B32B 15/04 (2013.01); B32B 17/06 (2013.01); B32B 27/08 (2013.01); H01L 21/67092 (2013.01); H01L 21/6838 (2013.01); B32B 2315/08 (2013.01); B32B 2457/202 (2013.01); B32B 2457/204 (2013.01); B32B 2457/206 (2013.01); B65H 2301/51122 (2013.01); H01L 2221/68318 (2013.01); H01L 2221/68386 (2013.01); Y10S 156/93 (2013.01); Y10S 156/941 (2013.01); Y10T 156/1168 (2015.01); Y10T 156/1978 (2015.01);
Abstract

A movable member is gripped in a delamination-start configuration, and the other-end side of a rib of a delamination member is pressed towards the other-end side of a flexible plate. The flexible plate then warps and deforms about the other end side of the flexible plate, which is supported by a support member, the flexible plate deforming along the direction in which delamination progresses. In concert with the delamination action, a reinforcing plate also warps and deforms along with the flexible plate, the reinforcing plate being vacuum-chucked to an air-permeable electroconductive sheet on the flexible plate, and the reinforcing plate is sequentially delaminated from a substratealong the direction in which delamination progresses.


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