The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 15, 2019

Filed:

Apr. 20, 2017
Applicants:

Boe Technology Group Co., Ltd., Beijing, CN;

Chongqing Boe Optoelectronics Technology Co., Ltd., Chongqing, CN;

Inventors:

Zhichao Wang, Beijing, CN;

Xiangyu Song, Beijing, CN;

Yongbing Guan, Beijing, CN;

Bingqiang Liu, Beijing, CN;

Kun Cao, Beijing, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); G03F 7/16 (2006.01); B65G 1/10 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67309 (2013.01); B65G 1/10 (2013.01); G03F 7/16 (2013.01);
Abstract

A storage device and a photoresist coating and developing machine having a storage device are disclosed. The storage device includes a frame and a plurality of layers of support plates disposed in sequence in the frame in a height direction of the frame, being used for receiving substrates to be exposed. The frame is provided with a plurality of layers of support members respectively associated with the plurality of layers of support plates, and each layer of the support plates is slidably mounted on the support member.


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