The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2019
Filed:
Apr. 12, 2018
Globalfoundries Inc., Grand Cayman, KY;
Cyril Cabral, Jr., Yorktown Heights, NY (US);
Lawrence A. Clevenger, Saratoga Springs, NY (US);
John M. Cohn, Richmond, VT (US);
Jeffrey P. Gambino, Portland, OR (US);
William J. Murphy, North Ferrisburgh, VT (US);
Anthony J. Telensky, Jericho, VT (US);
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Abstract
Systems and methods are provided for implementing a crystal oscillator to monitor and control semiconductor fabrication processes. More specifically, a method is provided for that includes performing at least one semiconductor fabrication process on a material of an integrated circuit (IC) disposed within a processing chamber. The method further includes monitoring by at least one electronic oscillator disposed within the processing chamber for the presence or absence of a predetermined substance generated by the at least one semiconductor fabrication process. The method further includes controlling the at least one semiconductor fabrication process based on the presence or absence of the predetermined substance detected by the at least one electronic oscillator.