The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2019
Filed:
Jul. 13, 2016
Applicant:
Microsaic Systems Plc, Woking, Surrey, GB;
Inventor:
Richard Syms, London, GB;
Assignee:
Microsaic Systems plc, Woking, Surrey, GB;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 49/06 (2006.01); H01J 49/00 (2006.01);
U.S. Cl.
CPC ...
H01J 49/067 (2013.01); H01J 49/0018 (2013.01);
Abstract
A method for forming a miniature skimmer cone for a free jet expansion vacuum interface is disclosed. The skimmer cone is formed from electroplated metal, deposited inside a blind hole formed on a silicon substrate. The substrate is partially removed to expose the skimmer cone, together with other features formed by etching, and an outlet orifice is formed. A complete miniature vacuum interface is formed from the stacked assembly of a part containing an inlet orifice, a spacer, and the part containing a skimmer cone described above, mounted in an intermediate pressure chamber at the inlet to a mass spectrometer.