The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2019
Filed:
May. 23, 2017
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventor:
Hideo Tanaka, Utsunomiya, JP;
Assignee:
CANON KABUSHIKI KAISHA, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70716 (2013.01);
Abstract
A holding device for holding a substrate includes a base including an intake hole and an exhaust flow path communicating with the intake hole, a moving member which is movable in a gravity direction by coming into contact with a substrate, and a determination unit configured to determine whether a moving member holds a substrate on the basis of changes in pressure of the exhaust flow path exhausted by an exhaust unit.