The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 15, 2019

Filed:

Mar. 28, 2018
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-Do, KR;

Inventors:

Shinji Ueyama, Kawasaki, JP;

Masato Kajinami, Tokyo, JP;

Tatsuya Ishimoto, Yokohama, JP;

Assignee:

SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-Do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01); H01L 21/67 (2006.01); H01L 21/66 (2006.01); G01B 11/30 (2006.01); G01N 21/94 (2006.01); G01N 21/95 (2006.01); G01B 11/06 (2006.01); G01B 11/25 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
G01N 21/8806 (2013.01); G01B 11/0608 (2013.01); G01B 11/25 (2013.01); G01B 11/303 (2013.01); G01N 21/94 (2013.01); G01N 21/9505 (2013.01); H01L 21/67288 (2013.01); H01L 22/12 (2013.01); G01N 2021/8848 (2013.01); G01N 2021/945 (2013.01); H01L 21/68764 (2013.01);
Abstract

An apparatus for testing an object includes a moving unit configured to hold and move the object. A transmissive illuminating unit includes a light source generating light and a transmissive mask pattern. The transmissive mask pattern includes a first region configured to convert the light generated from the light source into a slit light, and a second region arranged in a movement direction of the object with respect to the first region to partially transmit the light generated from the light source. The transmissive illuminating unit is configured to project a measuring light, which is provided by transmitting the light generated from the light source through the transmissive mask pattern, to the object. A detecting unit is configured to receive a reflected light of the measuring light from the object and to detect a height and surface state of the object based on the reflected light.


Find Patent Forward Citations

Loading…