The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2019
Filed:
Jun. 06, 2016
Applicant:
Boe Technology Group Co., Ltd., Beijing, CN;
Assignee:
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/04 (2006.01); C23C 14/24 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/042 (2013.01); C23C 14/04 (2013.01); C23C 14/24 (2013.01); H01L 51/0011 (2013.01);
Abstract
The present disclosure provides a mask repairing apparatus, a method for repairing a mask and an evaporation apparatus. The mask repairing apparatus includes: a repairing device configured to repair a portion of a mask to be repaired; and a moving mechanism installed within a region facing towards the mask and configured to drive the repairing device to move to a position which is opposite to the portion of the mask to be repaired.