The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2019
Filed:
Sep. 23, 2016
Lgs Innovations Llc, Herndon, VA (US);
Michael Jarret Holyoak, Morristown, NJ (US);
George Kenneth Kannell, Florham Park, NJ (US);
Marc Jay Beacken, Randolph, NJ (US);
David J. Bishop, Brookline, MA (US);
Jackson Chang, Newton, MA (US);
Matthias Imboden, St. Blaise NE, CH;
LGS Innovations LLC, Herndon, VA (US);
Abstract
The present application is directed to a MEMS device. The MEMS device includes a substrate having a first end and a second end extending along a longitudinal axis, the substrate including an electrostatic actuator. The device also includes a movable plate having a first end and a second end. The device also includes a thermal actuator having a first end coupled to the first end of the substrate and a second end coupled to the first end of the plate. The actuator moves the plate in relation to the substrate. Further, the device includes a power source electrically coupled to the thermal actuator and the substrate. The application is also directed to a method for operating a MEMS device.