The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 08, 2019

Filed:

Jul. 26, 2016
Applicant:

Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Inventors:

Frank Fournel, Villard-Bonnot, FR;

Xavier Baillin, Crolles, FR;

Séverine Cheramy, Claix, FR;

Patrick Leduc, Grenoble, FR;

Loic Sanchez, Voiron, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); H01L 25/00 (2006.01);
U.S. Cl.
CPC ...
H01L 24/80 (2013.01); H01L 24/03 (2013.01); H01L 24/05 (2013.01); H01L 24/97 (2013.01); H01L 25/50 (2013.01); H01L 2224/0381 (2013.01); H01L 2224/056 (2013.01); H01L 2224/05568 (2013.01); H01L 2224/05686 (2013.01); H01L 2224/08148 (2013.01); H01L 2224/08238 (2013.01); H01L 2224/80004 (2013.01); H01L 2224/80013 (2013.01); H01L 2224/80143 (2013.01); H01L 2224/80205 (2013.01); H01L 2224/80894 (2013.01); H01L 2224/80948 (2013.01); H01L 2224/95146 (2013.01); H01L 2224/97 (2013.01);
Abstract

A method for direct bonding an electronic chip onto a substrate or another electronic chip, the method including: carrying out a hydrophilic treatment of a portion of, a surface of the electronic chip and of a portion of a surface of the substrate or of the other electronic chip; depositing an aqueous fluid on the portion of the surface of the substrate or of the second electronic chip; depositing the portion of the surface of the electronic chip on the aqueous fluid; drying the aqueous fluid until the portion of the surface of the electronic chip is rigidly connected to the portion of the surface of the substrate or of the other electronic chip: and during at least part of the drying of the aqueous fluid, emitting ultrasound into the aqueous fluid through the substrate or the other electronic chip.


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