The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2019
Filed:
Oct. 08, 2015
Screen Holdings Co., Ltd., Kyoto, JP;
Takahiro Yamada, Kyoto, JP;
SCREEN Holdings Co., Ltd., Kyoto, JP;
Abstract
A substrate having a surface on which a resist film is formed and that has undergone pattern exposure processing and development processing is conveyed into a chamber and held by a holding plate. The surface of the substrate W held by the holding plate is irradiated with flash light emitted from flash lamps. The spectral distribution of the flash light has a peak in a wavelength range of 200 nm to 300 nm. The spectral distribution of the flash light also shows that the relative intensity at a wavelength of 300 nm is 20% or more higher than that at a wavelength of 500 nm. Since the resist film absorbs ultraviolet rays, the resist film can be selectively heated by irradiating the resist film with flash light that includes a large number of wavelength components in the ultraviolet region.