The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2019
Filed:
Mar. 02, 2016
Applicant:
Nippon Light Metal Company, Ltd., Tokyo, JP;
Inventors:
Akira Iizuka, Shizuoka, JP;
Koichi Nakano, Shizuoka, JP;
Hayato Kiyomi, Shizuoka, JP;
Kazuhiro Oda, Shizuoka, JP;
Tomohiro Isobe, Shizuoka, JP;
Assignee:
NIPPON LIGHT METAL COMPANY, LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/64 (2012.01); C22C 1/00 (2006.01); C22C 21/02 (2006.01); C22C 21/04 (2006.01);
U.S. Cl.
CPC ...
G03F 1/64 (2013.01); C22C 1/00 (2013.01); C22C 21/02 (2013.01); C22C 21/04 (2013.01);
Abstract
A support frame for a pellicle includes a frame body made of an aluminum alloy. The frame body has: a top surface onto which a pellicle film is bonded; and an underside surface onto which a transparent substrate is bonded. A material of which the frame body is made has a Young's modulus larger than that of which the transparent substrate is made. The structure described above makes it possible to reduce deformation of the transparent substrate.