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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10437046 B1

PDFFull Text
Date of Patent:
Oct. 08, 2019

Filed:

May. 04, 2016

Micro electro mechanical system and layered hinge for use in mems micromirror having first and second serpentine shapes

Applicant:

Ag Microsystems Inc., Fremont, CA (US);

Inventors:

Asif Godil, Pleasanton, CA (US);

Chase Valiente, San Jose, CA (US);

Assignee:

AG MICROSYSTEMS, INC., Fremont, CA (US);

Attorney:

Morgan, Lewis & Bockius LLP

Primary Examiner:

Jennifer D Carruth

Assistant Examiner:

Ryan S Dunning

Int. Cl.
CPC ...
G02B 26/08 (2006.01); G02B 26/10 (2006.01); G02B 7/00 (2006.01); G02B 7/02 (2006.01); B81B 7/00 (2006.01); B81B 7/02 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0841 (2013.01); G02B 26/0833 (2013.01); B81B 7/0003 (2013.01); B81B 7/02 (2013.01); B81B 2201/04 (2013.01); B81B 2203/0145 (2013.01); B81B 2207/091 (2013.01); G02B 26/101 (2013.01); G02B 26/105 (2013.01);
Abstract

Two-axis MEMS Micromirror is disclosed featuring combs drive actuation with independent drive for each of two axes of rotation and a layered hinge design providing an improved shock and vibration performance. The two-axis MEMS Micromirror is fabricated using Double SOI wafer as the primary starting material. In addition, actuation voltages are driven to an inner axis through multiple layers in one or more outer hinges, allowing for a robust and reliable micromirror that is easy to drive with multiple DC voltages, and moderately insensitive to temperature, shock and vibration. Furthermore, this novel design achieves set angles that are highly stable over time.

Find Patent Forward Citations

Godil, Asif. (2019). Micro electro mechanical system and layered hinge for use in mems micromirror having first and second serpentine shapes (U.S. Patent No. 10437046). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10437046

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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