The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 08, 2019

Filed:

Nov. 13, 2018
Applicant:

Chroma Ate Inc., Tao-Yuan, TW;

Inventors:

Yi-Chang Chiu, Tao-Yuan, TW;

Cheng-Ting Tsai, Tao-Yuan, TW;

Shih-Yao Pan, Tao-Yuan, TW;

Lan-Sheng Yang, Tao-Yuan, TW;

Hsiu-Wei Kuo, Tao-Yuan, TW;

Shao-En Chung, Tao-Yuan, TW;

Assignee:

CHROMA ATE INC., Tao-Yuan, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/30 (2006.01); G01N 21/51 (2006.01); G01N 21/958 (2006.01); G01N 21/47 (2006.01);
U.S. Cl.
CPC ...
G01B 11/303 (2013.01); G01N 21/51 (2013.01); G01N 21/958 (2013.01); G01N 2021/4735 (2013.01);
Abstract

A surface measurement system is configured to measure a sample with a low reflectivity surface. The surface measurement system includes a condensation device and a measurement device. The condensation device is configured to form a liquid layer on the surface of the sample. The condensation device includes a chamber, a temperature controlling gas source, and a humidification gas source. The chamber is configured to accommodate the sample. The temperature controlling gas source is connected to the chamber to provide temperature controlling gases to the chamber, so as to control the temperature of the sample. The humidification gas source is connected to the chamber to provide water vapor to the chamber, so as to form the liquid layer on the surface of the sample. The measurement device includes a plate, a light source, and an image capturing device.


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