The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2019
Filed:
Mar. 02, 2018
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Alfons Dehe, Reutlingen, DE;
Abidin Güçlü Onaran, Munich, DE;
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 19/04 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); H04R 19/00 (2006.01); H04R 7/04 (2006.01);
U.S. Cl.
CPC ...
H04R 19/04 (2013.01); B81B 3/0056 (2013.01); B81C 1/00166 (2013.01); H04R 7/04 (2013.01); H04R 19/005 (2013.01); B81B 2201/0235 (2013.01); B81B 2201/0257 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0361 (2013.01); B81B 2203/04 (2013.01); H04R 2201/003 (2013.01);
Abstract
A MEMS device includes a membrane and a counter electrode structure spaced apart from the membrane. The counter electrode structure includes a non-planar conductive layer. The MEMS device includes an air gap between the membrane and the counter electrode structure. The air gap has a non-uniform thickness.