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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10431744 B1

PDFFull Text
Date of Patent:
Oct. 01, 2019

Filed:

Jan. 30, 2018

Method of manufacturing organic light-emitting display apparatus using barrier layer having high fluorine content

Applicant:

Samsung Display Co., Ltd., Yongin-si, KR;

Inventors:

Younggil Kwon, Yongin-si, KR;

Seungyong Song, Yongin-si, KR;

Assignee:

Samsung Display Co., Ltd., Yongin-si, KR;

Attorney:

H.C. Park & Associates, PLC

Primary Examiner:

Stephen W Smoot

Int. Cl.
CPC ...
H01L 51/00 (2006.01); G03F 7/00 (2006.01); G03F 7/20 (2006.01); G03F 7/26 (2006.01); G03F 7/09 (2006.01); G03F 7/16 (2006.01); H01L 51/52 (2006.01); H01L 51/50 (2006.01); H01L 27/32 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0018 (2013.01); G03F 7/0007 (2013.01); G03F 7/094 (2013.01); G03F 7/16 (2013.01); G03F 7/2002 (2013.01); G03F 7/26 (2013.01); H01L 27/3211 (2013.01); H01L 51/001 (2013.01); H01L 51/0003 (2013.01); H01L 51/0016 (2013.01); H01L 51/0023 (2013.01); H01L 51/5012 (2013.01); H01L 51/5228 (2013.01); H01L 51/5203 (2013.01);
Abstract

A method of manufacturing an organic light-emitting display apparatus including: forming a lift-off layer including a fluoropolymer, a barrier layer having a higher fluorine content than the lift-off layer, and a photoresist on a substrate including a first electrode; removing a portion corresponding to the first electrode by patterning the photoresist, and leaving the remaining portion; exposing the first electrode by etching the lift-off layer and the barrier layer on the first electrode; forming an organic functional layer on the first electrode and on the remaining photoresist; removing the barrier layer, the photoresist, and the organic functional layer on the remaining lift-off layer; and forming a second electrode on the organic functional layer on the first electrode.

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