The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2019
Filed:
Aug. 29, 2016
Pfeiffer Vacuum, Annecy, FR;
Olivier Le-Barillec, Pringy, FR;
Julien Bounouar, Annecy, FR;
PFEIFFER VACUUM, Annecy, FR;
Abstract
A method for measuring contamination of a transport box for atmospheric conveyance and storage of substrates is provided, the method including: measuring a concentration of at least one gaseous species inside the transport box by a measurement device including at least one gas analyzer and a measurement line connecting the at least one gas analyzer to an interface, the interface placing the measurement line in communication with an internal atmosphere of the transport box; and supplying a gas flow containing water vapor to the measurement device. There is also provided a station for measuring contamination of a transport box for atmospheric conveyance and storage of substrates.