The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 01, 2019

Filed:

Dec. 20, 2017
Applicant:

Industrial Technology Research Institute, Hsinchu, TW;

Inventors:

Ming-Hsien Wu, Tainan, TW;

Yih-Der Guo, Hsinchu, TW;

Yen-Hsiang Fang, New Taipei, TW;

Yao-Jun Tsai, Taoyuan, TW;

Yi-Chen Lin, Taipei, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); H01L 21/683 (2006.01); H01L 23/00 (2006.01); H01L 33/00 (2010.01); H01L 21/67 (2006.01); H01L 33/20 (2010.01);
U.S. Cl.
CPC ...
H01L 21/67333 (2013.01); H01L 21/67144 (2013.01); H01L 21/6838 (2013.01); H01L 24/95 (2013.01); H01L 33/0095 (2013.01); H01L 33/00 (2013.01); H01L 33/20 (2013.01);
Abstract

A transfer support adapted to contact a plurality of elements is provided. The transfer support has a first surface, a second surface opposite to the first surface, a recess located on the second surface, a plurality of platforms protruded from the first surface, a plurality of supporting pillars distributed in the recess and a plurality of through holes. The platforms have carry surfaces adapted to contact the plurality of elements. The through holes extend from the carry surfaces of the platforms to the recess, and two of the adjacent supporting pillars are spaced apart from each other to form an air passage. In addition, a transfer module is also provided.


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