The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2019
Filed:
Apr. 21, 2016
Kawasaki Jukogyo Kabushiki Kaisha, Kobe-shi, Hyogo, JP;
Hirohiko Goto, Akashi, JP;
KAWASAKI JUKOGYO KABUSHIKI KAISHA, Kobe-shi, JP;
Abstract
A substrate conveyance robot is provided with a robot arm capable of elevating; a substrate holding device mounted to the robot arm; and a substrate detection unit for detecting a substrate held by the substrate holding device. The substrate detection unit has a substrate sensor for detecting the substrate and a sensor elevating unit for scanning a region including a position where the substrate is arranged by elevating the substrate sensor without elevating the robot arm. Thus, the substrate in a device provided with an opening having a small dimension can be detected without hindrance while preventing collision of the robot and the device.