The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 01, 2019

Filed:

Jan. 12, 2018
Applicant:

Samsung Display Co. Ltd., Yongin-si, Gyeonggi-do, KR;

Inventor:

Futoshi Yoshida, Asan-si, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/027 (2006.01); B41K 3/42 (2006.01); G02F 1/1335 (2006.01); G02F 1/1362 (2006.01);
U.S. Cl.
CPC ...
H01L 21/027 (2013.01); B41K 3/42 (2013.01); G02F 1/133528 (2013.01); G02F 2001/133548 (2013.01); G02F 2001/136295 (2013.01);
Abstract

An imprint method includes: applying a applying a material for forming a patterned layer having a pattern, to a substrate; feeding a stamp film including a stamp pattern corresponding to the pattern of the patterned layer, along a pressure roller and an idle roller; forming the patterned layer having the pattern, including: the pressure roller pressing the stamp film toward the material to contact the stamp pattern of the stamp film with the material layer, curing the material layer in contact with the stamp pattern, and moving the pressure roller and the idle roller to peel the stamp film off the cured material layer by a peeling force, to form the patterned layer having the pattern; and detecting a defect in the formed patterned layer, during the peeling of the stamp film, by sensing the peeling force in real time by a pressure sensor connected to the pressure roller.


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