The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2019
Filed:
Dec. 29, 2016
Applicant:
Stream Mosaic, Inc., San Jose, CA (US);
Inventor:
Jeffrey Drue David, San Jose, CA (US);
Assignee:
STREAM MOSAIC, INC., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06N 7/00 (2006.01); H01L 21/66 (2006.01); G06N 20/00 (2019.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G06N 7/005 (2013.01); G03F 7/705 (2013.01); G03F 7/70625 (2013.01); G03F 7/70633 (2013.01); G06N 20/00 (2019.01); H01L 22/12 (2013.01); H01L 22/14 (2013.01); H01L 22/20 (2013.01);
Abstract
Techniques for measuring and/or compensating for process variations in a semiconductor manufacturing processes. Machine learning algorithms are used on extensive sets of input data, including upstream data, to organize and pre-process the input data, and to correlate the input data to specific features of interest. The correlations can then be used to make process adjustments. The techniques may be applied to any feature or step of the semiconductor manufacturing process, such as overlay, critical dimension, and yield prediction.