The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 01, 2019

Filed:

Nov. 03, 2017
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;

Inventors:

Hyo-Sig Won, Suwon-si, KR;

Myung-Soo Jang, Seoul, KR;

Hyoun-Soo Park, Seoul, KR;

Da-Yeon Cho, Seongnam-si, KR;

Assignee:

SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-Do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01); G03F 7/20 (2006.01); G03F 1/70 (2012.01);
U.S. Cl.
CPC ...
G06F 17/5081 (2013.01); G03F 1/70 (2013.01); G03F 7/70433 (2013.01); G03F 7/70466 (2013.01); G06F 17/5072 (2013.01);
Abstract

A computer-implemented method compresses placing standard cells based on design data defining an integrated circuit (IC). A layout of the IC is generated by performing colorless routing, by which a first pattern, a second pattern, and a third pattern in a triple patterning lithography (TPL) layer are arranged on the placed standard cells. The arrangement is based on space constraints. The generated layout is stored to a non-transitory computer-readable storage medium. The space constraints define minimum spaces between the first pattern, the second pattern, and the third pattern. A color violation does not occur between the first pattern, second pattern, and the third pattern. A first mask, a second mask, and a third mask are generated based on the layout. A semiconductor device is manufactured by using the generated first mask, the second mask, and the third mask.


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