The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2019
Filed:
Nov. 22, 2016
Applicant:
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Inventors:
Daisuke Kori, Jyoetsu, JP;
Tsutomu Ogihara, Jyoetsu, JP;
Takeru Watanabe, Jyoetsu, JP;
Yoshinori Taneda, Jyoetsu, JP;
Rie Kikuchi, Jyoetsu, JP;
Assignee:
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/32 (2006.01); G03F 7/09 (2006.01); G03F 7/039 (2006.01); C09D 149/00 (2006.01); C09D 165/00 (2006.01); G03F 7/20 (2006.01); H01L 21/02 (2006.01); G03F 7/16 (2006.01); H01L 21/027 (2006.01); H01L 21/3105 (2006.01); C09D 155/00 (2006.01); C08G 8/08 (2006.01); G03F 7/075 (2006.01); H01L 21/033 (2006.01);
U.S. Cl.
CPC ...
G03F 7/322 (2013.01); C08G 8/08 (2013.01); C09D 149/00 (2013.01); C09D 155/00 (2013.01); C09D 165/00 (2013.01); G03F 7/004 (2013.01); G03F 7/0397 (2013.01); G03F 7/0752 (2013.01); G03F 7/091 (2013.01); G03F 7/094 (2013.01); G03F 7/16 (2013.01); G03F 7/168 (2013.01); G03F 7/2041 (2013.01); G03F 7/325 (2013.01); H01L 21/0274 (2013.01); H01L 21/0276 (2013.01); H01L 21/02118 (2013.01); H01L 21/02282 (2013.01); H01L 21/0332 (2013.01); H01L 21/31051 (2013.01); C08G 2261/135 (2013.01); C08G 2261/3424 (2013.01); C08G 2261/76 (2013.01);
Abstract
The present invention provides a compound for forming an organic film which has a minimum complex viscosity of 10 Pa·s or less when the complex viscosity is measured within a range of 50° C. to 300° C. This compound for forming an organic film can provide an organic film composition having high filling and planarizing properties.