The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2019
Filed:
Sep. 21, 2017
Applicant:
Rohm and Haas Electronic Materials Korea Ltd., Cheonan, Chungcheongnam-Do, KR;
Inventors:
Jung-June Lee, Chungcheongnam-Do, KR;
Jae Bong Lim, Chungcheongnam-Do, KR;
Assignee:
Rohm and Haas Electronic Materials Korea Ltd., Cheonan, Chungcheongnam-do, KR;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/26 (2006.01); C09D 5/00 (2006.01); G03F 7/09 (2006.01); C07C 309/06 (2006.01); C07D 277/22 (2006.01); C07D 241/12 (2006.01); C07D 263/32 (2006.01); C07D 239/26 (2006.01); H01L 21/027 (2006.01); H01L 21/033 (2006.01); G03F 7/11 (2006.01); H01L 21/311 (2006.01); C07D 213/75 (2006.01); G03F 7/40 (2006.01);
U.S. Cl.
CPC ...
G03F 7/26 (2013.01); C07C 309/06 (2013.01); C07D 213/75 (2013.01); C07D 239/26 (2013.01); C07D 241/12 (2013.01); C07D 263/32 (2013.01); C07D 277/22 (2013.01); C09D 5/006 (2013.01); G03F 7/004 (2013.01); G03F 7/091 (2013.01); G03F 7/11 (2013.01); G03F 7/40 (2013.01); H01L 21/0274 (2013.01); H01L 21/0276 (2013.01); H01L 21/0332 (2013.01); H01L 21/0337 (2013.01); H01L 21/311 (2013.01);
Abstract
New methods and substrates are provided that include antireflective compositions that comprise one or more thermal acid generators.